Take advantage of Swagelok’s technical expertise in semiconductor fluid systems and processes, including atomic layer deposition, copper deposition, cobalt deposition, chemical vapor deposition (CVD), physical layer deposition (PVD), chemical mechanical polishing, and wafer cleaning. Let Swagelok help you meet your goals in ultra-high purity manufacturing. You can trust Swagelok to provide the products you need so you can manufacture products with confidence.
Whether your processes include ALD to produce conformal films, or PVD and CVD for particle application via gas mixture, Swagelok has solutions for deposition on substrates.
Chemical Mechanical Polishing/Planarization (CMP)
Swagelok products provide fluid and gas delivery solutions for applications using chemical and mechanical forces to provide smooth wafers.
More aggressive chemistries used to clean wafers demand more robust solutions to deliver critical fluids without damaging substrates. Swagelok’s products deliver leak-tight performance, even in challenging conditions.